High Vaccum Evaporator

Institute of Science and Technology Austria (IST Austria)

Klosterneuburg | Website

Großgerät

Kurzbeschreibung

The MEB 550S electron beam evaporator with fully automated control. For reduced pumping time the machine has a load lock and is capable of processing substrates up to 4". The substrate holder can be adjusted in an angel to the source with an accuracy of 0.01°. It also can rotate around it's own axis. For cleaning/etching substrates the evaporator has an ion gun with which an O2 or Ar/O2 plasma can be created. The accuracy of the deposition rate is determined by an oscillating crystal and is up to 0.01nm/s.

Available Metals: Al, Au, Pd, Pt, Ti, Cr, Co, V, Nb

Ansprechperson

Dr. Salvatore Bagiante

Research Services

Physics

Methoden & Expertise zur Forschungsinfrastruktur

Micro- and nanofabrication processing, development of new processes, characterization, training

Zuordnung zur Core Facility

Cleanroom

Information on terms of use, cooperation and fees is provided upon request. All such information is defined in a scientific collaboration agreement.