Ultra-High Vaccum Evaporator

Institute of Science and Technology Austria (IST Austria)

Klosterneuburg | Website

Großgerät

Kurzbeschreibung

The MEB 550 S2 is a UHV type evaporator with three chambers. This computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The source chamber is cryo pumped and separated from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching.

Allowed metals: Al, Nb, Ti

Source chamber with a linear 4x 15 cc UHV ebeam source
Treatment chamber above the source chamber
Lateral Sample load lock for a 4" substrate
Possibility for in-situ oxidation

Ansprechperson

Dr. Salvatore Bagiante

Research Services

Physics

Methoden & Expertise zur Forschungsinfrastruktur

Micro- and nanofabrication processing, development of new processes, characterization, training

Zuordnung zur Core Facility

Cleanroom

Information on terms of use, cooperation and fees is provided upon request. All such information is defined in a scientific collaboration agreement.