Ionenimplantor

JKU - Johannes Kepler University Linz

Linz | Website

Large equipment

Short Description

Ion implanter with acceleration voltages up to 400 kV, isotope filtering, can be used for rather all elements.

Contact Person

Univ.-Prof. DI Dr. Kurt Hingerl

Research Services

Ion implanter with acceleration voltages up to 400 kV, isotope filtering, can be used for rather all elements.

Methods & Expertise for Research Infrastructure

Implantation of different elements with acceleration voltages up to 400 kV. Simulation of defect and doping profile by SRIM / TRIM. Expetrience in annealing procedures.

Allocation to Core Facility

ZONA - Center for Surface and Nanoanalytics

Univ.-Prof. DI Dr. Kurt Hingerl
Zentrum für Oberflächen- und Nanoanalytik
+43 732 2468 3444
kurt.hingerl@jku.at
https://www.jku.at/zona
For details please contact the responsible scientist. JKU website https://www.jku.at/zona
Techn. Univ. Vienna
Infineon
Voest Alpine Stahl
CDL-MS-MACH Christian Doppler Laboratory for Microscopic and Spectroscopic Material Characterisation
October 2009 - September 2016
Assoz.Prof. DI Dr. David Stifter
https://www.jku.at/en/center-for-surface-and-nanoanalytics-zona/research/finished-research-projects/cdl-ms-mach/