Institute of Science and Technology Austria (IST Austria)
Klosterneuburg | Website
Short Description
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets for device manufacturing.
This technology can combine both chemical reactions and ion-induced etching. The independent control of ion flux enables high process flexibility.
Deep silicon etching
Bosch process capability : C4F8 and SF6
ICP source 1200 W at 13.56 MHz driven parallel plate reactor
Wide temperature range substrate electrode: -150 to + 400 °C
Gasses: C4F8, CHF3, CF4, SF6, O2, Ar
Vacuum load lock
Shower head gas inlet optimized for RIE
High conductance vacuum layout
Contact Person
Dr. Salvatore Bagiante
Research Services
Physics
Methods & Expertise for Research Infrastructure
Micro- and nanofabrication processing, development of new processes, characterization, training
Allocation to Core Facility
+43(0)2243 9000-1174
https://forschungsinfrastruktur.bmbwf.gv.at
https://ist.ac.at/en/research/scientific-service-units/nanofabrication-facility/