ZEISS 1540XB CrossBeam

JKU - Johannes Kepler University Linz

Linz | Website

Short Description

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Contact Person

DI Dr. Heiko Groiss

Research Services

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Methods & Expertise for Research Infrastructure

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Allocation to Core Facility

ZONA - Center for Surface and Nanoanalytics