Silicon Austria Labs GmbH (SAL)
Villach | Website
Spatial research infrastructure
Short Description
Reinraum class 8 (EN ISO 14644-1)
Level of purity: not more than 29 300 particles, size ≥ 5,0 µm and 832 000 particles, size ≥ 1,0 µm per cubic meter
Air circulation: h-1: 9
Ventilation: h-1: 120
Temperature (+/- 1K): 22 °C
Humidity (+/-5%): rF%: 50 %
Contact Person
Dr. Werner Scherf
Research Services
Sensor element / material Analysis, micro-electro-mechanical- systems, acoustic MEMS, photonic MEMS, Heterogeneous Integration Technologies (HIT), 3D-Integration, Chip-Bonding
Methods & Expertise for Research Infrastructure
Micro- Nanostructures, feasibility studies, tests, chipbonding, simulations