Kurzbeschreibung
Multiple purpose versatile etching tool for WBG materials and metal etching.
Ansprechperson
Heimo Müller
Research Services
Research Services
R&D versatile capability etching Tool with wide temperature range heated lower electrode. Proposed for wide band gap materials, glass and ceramics Dry etching. Mechanical clamping for wafers up to 8“ in diameter.
Methoden & Expertise zur Forschungsinfrastruktur
Material etching portfolio:
• Metals
• PZT
• AlN and AlScN (up to 40% Scandium)
• LiNbO
• SiC, SiOC
• GaN, InGaN, AlGaN
Zuordnung zur Forschungsinfrastruktur
The terms of use are to be agreed individually. Send your request to the indicated contact. The GTC of SAL apply: https://silicon-austria-labs.com/agb/