Forschungsinfrastruktur

Institute of Science and Technology Austria (IST Austria)

Klosterneuburg | Website

Kurzbeschreibung

The MEB 550 S2 is a UHV type evaporator with three chambers. This computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The source chamber is cryo pumped and separated from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching.

Allowed metals: Al, Nb, Ti

Source chamber with a linear 4x 15 cc UHV ebeam source
Treatment chamber above the source chamber
Lateral Sample load lock for a 4" substrate
Possibility for in-situ oxidation

Ansprechperson

Dr. Salvatore Bagiante

Research Services

Physics

Methoden & Expertise zur Forschungsinfrastruktur

Micro- and nanofabrication processing, development of new processes, characterization, training

Zuordnung zur Core Facility

Nanofabrication Facility