Institute of Science and Technology Austria (ISTA)
Klosterneuburg | Website
Kurzbeschreibung
The MEB 550 S2 is a UHV type evaporator with three chambers. This computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The source chamber is cryo pumped and separated from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching.
Allowed metals: Al, Nb, Ti
Source chamber with a linear 4x 15 cc UHV ebeam source
Treatment chamber above the source chamber
Lateral Sample load lock for a 4" substrate
Possibility for in-situ oxidation
Ansprechperson
Dr. Salvatore Bagiante
Research Services
Physics
Methoden & Expertise zur Forschungsinfrastruktur
Micro- and nanofabrication processing, development of new processes, characterization, training