Forschungsinfrastruktur

Institute of Science and Technology Austria (IST Austria)

Klosterneuburg | Website

Kurzbeschreibung

Our new established Nanofabrication Facility has opened its cleanroom in Q1 2017. It provides a cleanroom space of 420 sqm of new ISO 7 (class 10000), ISO 6 (class 1000) and with specific areas ISO 5 (class 100) - equipped with all the state of the art nanofabrication facilities.

The Nanofabrication Facility provides tools to researchers and students to support them in their research. Furthermore, it develops, optimizes and maintains micro- and nanofabrication processes.

Ansprechperson

Dr. Salvatore Bagiante

Research Services

Physics

Methoden & Expertise zur Forschungsinfrastruktur

Micro- and nanofabrication processing, development of new processes, characterization, training

Equipment der Core Facility

• Mask Aligner
• Scanning Electron Microscope
• High Vaccum Evaporator
• Ultra-High Vaccum Evaporator
• Atomic Layer Depostion
• Electro Beam Lithography
• HF Vapour Etcher
• ICP-RIE etcher (F)
• ICP-RIE etcher (Cl)
• Atomic Force Microscope
• Plasma Xenon Focus Ion Beam