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Our new established Nanofabrication Facility has opened its cleanroom in Q1 2017. It provides a cleanroom space of 420 sqm of new ISO 7 (class 10000), ISO 6 (class 1000) and with specific areas ISO 5 (class 100) - equipped with all the state of the art nanofabrication facilities.
The Nanofabrication Facility provides tools to researchers and students to support them in their research. Furthermore, it develops, optimizes and maintains micro- and nanofabrication processes.
Dr. Salvatore Bagiante
Methoden & Expertise zur Forschungsinfrastruktur
Micro- and nanofabrication processing, development of new processes, characterization, training