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Spatial research infrastructure Monitoring „HRSM 2016“

Cleanroom in the LIT Open Innovation Center

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JKU - Johannes Kepler University Linz

Linz | Website


Short Description

New Cleanrom in the LIT Open Innovation Center

Contact Person

Univ.-Prof. Dr. Armando Rastelli

Research Services

Thin film deposition (metals, dielectrics), optical lithography, electron-beam-lithography...

Methods & Expertise for Research Infrastructure

Lithography, Etching, Material deposition, hybrid integration

Allocation to Core Facility

Zentrum für Halbleiter Nanostrukturen

Terms of Use

For details please contact the responsible person.

Cooperation Partners

TU Wien, Univ. Innsbruck, FH Vorarlberg, ISTA

Contact

Univ.-Prof. Dr. Armando Rastelli
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
armando.rastelli@jku.at
https://www.jku.at/hfp/

Location

Location on map

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