JKU - Johannes Kepler University Linz
Linz | Website
Short Description
New Cleanrom in the LIT Open Innovation Center
Contact Person
Univ.-Prof. Dr. Armando Rastelli
Research Services
Thin film deposition (metals, dielectrics), optical lithography, electron-beam-lithography...
Methods & Expertise for Research Infrastructure
Lithography, Etching, Material deposition, hybrid integration
Allocation to Core Facility
For details please contact the responsible person.
TU Wien, Univ. Innsbruck, FH Vorarlberg, ISTA