Vienna University of Technology
Wien | Website
Large equipment
Short Description
The CRX-4.5K is a closed cycle helium probe station for the characterization of semiconductor devices directly at wafer level. The system provides a remarkable temperature range from 3.7K up to 675K.
Contact Person
Dr. Michael Waltl
Research Services
Tieftemperaturmessungen an mikroelektronischen Bauelementen
Methods & Expertise for Research Infrastructure
Defektspektroskopie in Halbeiterbauelementen, CV Messungen, DLTS, pulses MOS, OCVD etc.
Dr. Michael Waltl
Institut für Mikroelektronik
+43-1-58801-36050
waltl@iue.tuwien.ac.at
http://www.iue.tuwien.ac.at/sds
Institut für Mikroelektronik
+43-1-58801-36050
waltl@iue.tuwien.ac.at
http://www.iue.tuwien.ac.at/sds
Nach Vereinbarung