CLPS - ClosedLiquid He Probe Station

Vienna University of Technology

Wien | Website

Large equipment

Short Description

The CRX-4.5K is a closed cycle helium probe station for the characterization of semiconductor devices directly at wafer level. The system provides a remarkable temperature range from 3.7K up to 675K.

Contact Person

Dr. Michael Waltl

Research Services

Tieftemperaturmessungen an mikroelektronischen Bauelementen

Methods & Expertise for Research Infrastructure

Defektspektroskopie in Halbeiterbauelementen, CV Messungen, DLTS, pulses MOS, OCVD etc.

Dr. Michael Waltl
Institut für Mikroelektronik
+43-1-58801-36050
waltl@iue.tuwien.ac.at
http://www.iue.tuwien.ac.at/sds
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