Laser MBE-Anlage

Vienna University of Technology

Wien | Website

Large equipment

Short Description

Das Gerät erlaubt es, auf atomarer Ebene geordnete Oxid-Schichten herzustellen. Neben der Herstellung von reinen Oxiden ist auch die Herstellung von Mischoxiden, wie etwa Perowskiten möglich. Die hergestellten Proben können im angeschlossenen Oberflächen-Analysesystem detailliert charakterisiert werden.

Contact Person

Univ. Prof. Dr. Ulrike Diebold

Research Services

This setup combines a ultrahigh vacuum (UHV) surface analysis system with surface preparation facilities with a state-of-the-art pulsed laser deposition (PLD) system with epitaxial control. All sample transfer and preparation is contained in UHV with a base pressure of low 10-10 mbar.

This 4-chamber system allows the judicious growth and surface characterization single-crystalline, complex oxides with atomic control. Typical sample size: 5x5 mm2.

1) Surface preparation:
Load-lock with fast-sample entry. Sample manipulator with electron beam heater, ion source for sputtering, evaporators for physical vapour deposition, and a quartz crystal microbalance for thin-film measurements.

2) Surface characterisation:
XPS, ISS, LEED, variable temperature STM

3) PLD growth:
Pulsed Excimer laser, multiple-target carousal, fast-entry load-lock, hi-pressure RHEED system, movable quartz crystal microbalance, sample heating with diode laser, pyrometer for temperature measurement, gas inlet system with flow controllers, automated control for deposition/temperature/gas ramps.

4) Transfer chamber connecting the PLD and surface characterization chamber
Storage of multiple samples.

Methods & Expertise for Research Infrastructure

Das System ergänzt die Forschung über Oxidoberflächen um die Möglichkeit, derartige Oberflächen in höchster Qualität zu präparieren.

Univ. Prof. Dr. Ulrike Diebold
Institut für Angewante Physik
0043-1-58801-13425
diebold@iap.tuwien.ac.at
http://www.iap.tuwien.ac.at/www/surface/index
Nur im Rahmen von wissenschaftlichen Kooperationsprojekten
Institut für Materialchemie der TU Wien