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The Digital Holographic Microscope (DHM, http://www.lynceetec.com/reflection-dhm/) allows dynamic 3D characterization of microsystems. The two main types are:
1.) 3D vibration analysis:
Measurements over the entire field of view without scanning the XYZ coordinates.
It has an in-plane vibration resolution of 1 nm and an out-of-plane vibration resolution of up to 5 pm.
2.) Dynamic Live 3D topography:
Bandwidth from DC to 25 MHz
Measurement of vertical velocities up to 10 m/s
Dual laser configuration is available while the DHM is equipped with a turret with up to 6 lenses and allows measurements in combination with a measuring chamber. For vibration isolation, it is positioned on a passive vibration-damped table.
The device is equipped with the Koala Acquisition and MEMS Analysis Software for advanced post-analysis.
Dipl.-Ing. Dr. Wilfried Hortschitz
3D characterisation of micro systems (MEMS, MOEMS)
Characterisation and gauging of micro mechanical structures
Methods & Expertise for Research Infrastructure
The DHM allows for a 3D characterization of micro-systems (MEMS, MOEMS) which is carried out in static as well as steady state. For advanced post analysis the Koala acquisition and analysis software is available. E.g., bode plots for specific region(s) of interest can be created for all three spatial directions.