Physical Vapor Deposition of metals and semiconductors

JKU - Johannes Kepler University Linz

Linz | Website

Large equipment

Short Description

Physical Vapor Deposition of metals and semiconductors in a high vacuum environment. Materials are evaporated either by direct current heating or by electron beam evaporation. Main applications are metal coatings for electrical interconnects in semiconductor devices.

Contact Person

Univ.-Prof. Dr. Armando Rastelli

Research Services

Physical Vapor Deposition system for metals and semiconductors. Main application: deposition of metallic leads on semiconductor devices.

Methods & Expertise for Research Infrastructure

Semiconductor technology

Univ.-Prof. Dr. Armando Rastelli
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
armando.rastelli@jku.at
http://www.jku.at/hfp/
For details please contact the responsible scientist.
IST Austria
Univ. Rome Sapienza