JKU - Johannes Kepler University Linz
Linz | Website
Short Description
Physical Vapor Deposition of metals and semiconductors in a high vacuum environment. Materials are evaporated either by direct current heating or by electron beam evaporation. Main applications are metal coatings for electrical interconnects in semiconductor devices.
Contact Person
Univ.-Prof. Dr. Armando Rastelli
Research Services
Physical Vapor Deposition system for metals and semiconductors. Main application: deposition of metallic leads on semiconductor devices.
Methods & Expertise for Research Infrastructure
Semiconductor technology
Allocation to Core Facility
For details please contact the responsible scientist.
IST Austria
Univ. Rome Sapienza
Univ. Rome Sapienza