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Physical Vapor Deposition of metals and semiconductors in a high vacuum environment. Materials are evaporated either by direct current heating or by electron beam evaporation. Main applications are metal coatings for electrical interconnects in semiconductor devices.
Univ.-Prof. Dr. Friedrich Schäffler
Physical Vapor Deposition system for metals and semiconductors. Main application: deposition of metallic leads on semiconductor devices.
Methods & Expertise for Research Infrastructure