Forschungsinfrastruktur

JKU - Johannes Kepler University Linz

Linz | Website

Short Description

Physical Vapor Deposition of metals and semiconductors in a high vacuum environment. Materials are evaporated either by direct current heating or by electron beam evaporation. Main applications are metal coatings for electrical interconnects in semiconductor devices.

Contact Person

Univ.-Prof. Dr. Friedrich Schäffler

Research Services

Physical Vapor Deposition system for metals and semiconductors. Main application: deposition of metallic leads on semiconductor devices.

Methods & Expertise for Research Infrastructure

Semiconductor technology