Plasma Xenon Focus Ion Beam

Institute of Science and Technology Austria (IST Austria)

Klosterneuburg | Website

Large equipment

Short Description

The PFIB dual beam system, installed at IST Austria, combines a FIB column with an Ultra high resolution – SEM (UHR-SEM). This system represents the state of the art in focused ion beam technology. A typical gallium FIB has a maximum current of 100 nA, whereas the xenon-based Helios G4 PFIB has a maximum current of 2.5 μA. As the cutting rate is proportional to the current, the Helios G4 allows to increase the cutting speed by a factor of 25 while maintaining a 15 nm resolution even at the highest cutting rate. While the UHR-SEM column allow us to reach a resolution of 0.7nm @1kV.
The system is also equipped with state-of-the-art detectors for Energy Dispersing Detectors (EDS), Electron Backscatter Diffraction (EBSD), Scanning Transmission Electron Microscopy (STEM) analysis, and a MultiChem injection system to deliver up to six gases in the chamber.

Contact Person

Dr. Salvatore Bagiante

Research Services

Samples preparation, introdutions

Methods & Expertise for Research Infrastructure

Micro- and nanofabrication processing, development of new processes, characterization, training

Allocation to Core Facility

Nanofabrication Facility

Information on terms of use, cooperation and fees is provided upon request. All such information is defined in a scientific collaboration agreement.