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A scanning electron microskope (SEM) is a type of electron microscope that produces images of a sample by scanning it with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that can be detected and that contain information about the sample´s surface topography and composition. The electron beam is generally scanning in a raster scan pattern, and the beam´s position is combined with the detected signal to produce an image.
FH-Prof. Dipl.-Ing. Dr. Gernot Zitzenbacher
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