JKU - Johannes Kepler University Linz
Linz | Website
Short Description
Dry etching system for III-V compound semiconductors
Contact Person
Univ.-Prof. Dr. Armando Rastelli
Research Services
Etching of III-V compound semiconductor structures
Methods & Expertise for Research Infrastructure
Dry etching of III-V semiconductors with Chlorine and BCl3
Allocation to Core Facility
Upon agreement
University of Innsbruck
University of Vienna
University of Vienna