ZEISS 1540XB CrossBeam

JKU - Johannes Kepler University Linz

Linz | Website

Large equipment

Short Description

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Contact Person

Univ.-Prof. DI Dr. Kurt Hingerl

Research Services

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Methods & Expertise for Research Infrastructure

ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).

Allocation to Core Facility

ZONA - Center of Surface and Nanoanalytics

Univ.-Prof. DI Dr. Kurt Hingerl
Zentrum für Oberflächen- und Nanoanalytik
+43 732 2468 3444
kurt.hingerl@jku.at
http://www.jku.at/zona/
For details please contact the responsible scientist. See JKU website http://www.jku.at/zona/
voestalpine Stahl GmbH
EV Group E. Thallner GmbH
OSRAM GmbH
Christian Doppler Labor für Nanoskalige Phasenumwandlungen
CDL-MS-MACH Christian Doppler Laboratory for Microscopic and Spectroscopic Material Characterisation Motivation. https://www.jku.at/zentrum-fuer-oberflaechen-und-nanoanalytik-zona/forschung/beendete-forschungsprojekte/cdl-ms-mach/