JKU - Johannes Kepler University Linz
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Short Description
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Contact Person
Univ.-Prof. DI Dr. Kurt Hingerl
Research Services
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Methods & Expertise for Research Infrastructure
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Allocation to Core Facility
Zentrum für Oberflächen- und Nanoanalytik
+43 732 2468 3444
kurt.hingerl@jku.at
http://www.jku.at/zona/
Robert Bosch AG Austria
EV Group E. Thallner GmbH
OSRAM GmbH
Christian Doppler Labor für Nanoskalige Phasenumwandlungen