JKU - Johannes Kepler University Linz
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Short Description
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Contact Person
DI Dr. Heiko Groiss
Research Services
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Methods & Expertise for Research Infrastructure
ZEISS 1540XB CrossBeam is a ultra high resolution GEMINI® field emission column with the high performance Focused Ion Beam column into one integrated system. It gives the possibility to get live SEM-Imagination during FIB operation. Furthermore it allowes fully controlled targed preperations. The stage supports mechanically eucentric movements as well as compucentric rotation and tilting. A Gas Injection System (5 Gases) offers selective etching, enhanced etching, material deposition or isulator deposition. Also included is a micromanipulator for in situ samplehandling. There is also a variaty of different detectors to use, as SE, Inlens, BSE, EBSD (HKL) and EDX (Oxford).
Allocation to Core Facility
Robert Bosch AG Austria
EV Group E. Thallner GmbH
Christian Doppler Labor für Nanoskalige Phasenumwandlungen