Cleanroom in the LIT Open Innovation Center

JKU - Johannes Kepler University Linz

Linz | Website

Spatial research infrastructure

Short Description

New Cleanrom in the LIT Open Innovation Center

Contact Person

Univ.-Prof. Dr. Armando Rastelli

Research Services

Thin film deposition (metals, dielectrics), optical lithography, electron-beam-lithography...

Methods & Expertise for Research Infrastructure

Lithography, Etching, Material deposition, hybrid integration

Allocation to Core Facility

Zentrum für Halbleiter Nanostrukturen

Univ.-Prof. Dr. Armando Rastelli
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
armando.rastelli@jku.at
http://www.jku.at/hfp/
For details please contact the responsible person.
TU Wien, Univ. Innsbruck, FH Vorarlberg, ISTA