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Large equipment

Sputter Cluster

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Silicon Austria Labs GmbH (SAL)

Villach | Website


Short Description

Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.

Contact Person

Heimo Müller

Research Services

Research Services
• Metal, oxide, and nitride thin film sputtering from 5 modules
• (Pulsed) DC, RF, reactive/non-reactive, and co-sputtering capabilities
• Co-sputtering from up-to 4 targets in multisource module
• In-vacuo transport of wafers between modules and pre-treatment units
• Automated processing of 25 wafer batch
• Material examples: Pt, Ti, TiO2, SiO2 Mo, Al, W, AlN, AlScN, and many more on request

Methods & Expertise for Research Infrastructure

Magnetron sputtering – Evatec Clusterline 200E:
- 2 multisource modules for oxides/nitrides (+ HiPIMS generator), PZT module, single target nitride module with hot chuck, soft etch module, PEALD (2023)

Allocation to Core Facility

Silicon Austria Labs GmbH

Terms of Use

The terms of use are to be agreed individually. Send your request to the indicated contact. The GTC of SAL apply: https://silicon-austria-labs.com/agb/

Contact

Heimo Müller
heimo.mueller@silicon-austria.com
https://silicon-austria-labs.com/

Location

Location on map

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