18 Forschungsinfrastrukturen / Open for Collaboration
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- Großgerät
- 13
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- Räumliche Forschungsinfrastruktur
- 4
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- Core Facility (CF)
- 1
Forschungsfelder / Öfos-Kategorien
Top Kategorien / 3-steller
Hauptgruppen / 1-steller
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- Technische Wissenschaften
- 96,444%
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- Naturwissenschaften
- 3,556%
Thin Film Deposition Leybold UNIVEX 900
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
EVG Smart View
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
EVG Bond & Alignment System
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.
Heidelberg DWL 66
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...
Helios G4 SEM
Silicon Austria Labs GmbH (SAL)
The Helios G4 is a combined electron / focused ion beam microscope for topography and...
5G Testbed
Silicon Austria Labs GmbH (SAL)
5G-Testbed for industrial equipment via wireless connections.
EHD-Printer
Silicon Austria Labs GmbH (SAL)
SAL is the first institution worldwide offering completely new capabilities in high resolution printing to...
Reinraumlabor Klasse 5
Silicon Austria Labs GmbH (SAL)
Reinraum Klasse 5 (EN ISO 14644-1), 300 m² • Mikro- und Nanofabrikation: M(O)EMS, RF-Filter, integrierte...