18 Forschungsinfrastrukturen / Open for Collaboration
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- Großgerät
- 13
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- Räumliche Forschungsinfrastruktur
- 4
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- Core Facility (CF)
- 1
Silicon Austria Labs GmbH (SAL)
Reinraum Klasse 5 (EN ISO 14644-1), 300 m² • Mikro- und Nanofabrikation: M(O)EMS, RF-Filter, integrierte...
Silicon Austria Labs GmbH (SAL)
SAL is the first institution worldwide offering completely new capabilities in high resolution printing to...
Silicon Austria Labs GmbH (SAL)
5G-Testbed for industrial equipment via wireless connections.
Silicon Austria Labs GmbH (SAL)
The Helios G4 is a combined electron / focused ion beam microscope for topography and...
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...