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Large equipment

Helios G4 SEM

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Silicon Austria Labs GmbH (SAL)

Villach | Website


Short Description

The Helios G4 is a combined electron / focused ion beam microscope for topography and morphology analysis of micro- and nanostructures as well as the structuring of thereof. The system is equipped with a Bruker EDX detector, which allows to determine the composition of chemical elements in a sample.

Contact Person

Heimo Müller

Research Services

Research Services
• High resolution imaging
• EDX composition analysis
• Cross sections via Focus Ion Beam
• Small surface structurin via Focus Ion Beam
• Ebeam Lithography

Methods & Expertise for Research Infrastructure

Key Specifications:
• Up to 200 mm wafers – stage movement 150 mm x 150 mm
• High resolution SEM imaging with in-lens mode
• Electron column and Ion column (Ga-Ions) up to 30 kV
• Ion beam patterning and Gas injection system for Pt deposition and insulator enhanced etch (XeF2)
• SE detectors: ETD, TLD
• BSE detectors: TLD, MD, ICD, ABS, CBS
• EDX detector
• Software: XT microscope, Maps plugin, Nanobuilder plugin
• Add on 2022 : EBL Lithography capability with the software Elphy Multibeam (RAITH)

Allocation to Core Facility

Silicon Austria Labs GmbH

Terms of Use

The terms of use are to be agreed individually. Send your request to the indicated contact. The GTC of SAL apply: https://silicon-austria-labs.com/agb/

Contact

Heimo Müller
heimo.mueller@silicon-austria.com
https://silicon-austria-labs.com/

Location

Location on map

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