Lithografiegerät Mask-Aligner

JKU - Johannes Kepler University Linz

Linz | Website

Large equipment

Short Description

System for optical lithography of structures with sizes doen to 500 nm

Contact Person

Prof. Dr. Thomas Fromherz

Research Services

Optical lithography

Methods & Expertise for Research Infrastructure

Optical lithography for metallization and etching

Allocation to Core Facility

Zentrum für Halbleiter Nanostrukturen

Prof. Dr. Thomas Fromherz
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
Please contact the responsible person, Prof. Dr. Thomas Fromherz