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Large equipment

Lithography Mask Aligner

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JKU - Johannes Kepler University Linz

Linz | Website


Short Description

System for optical lithography of structures with sizes doen to 500 nm

Contact Person

Prof. Dr. Thomas Fromherz

Research Services

Optical lithography

Methods & Expertise for Research Infrastructure

Optical lithography for metallization and etching

Allocation to Core Facility

Zentrum für Halbleiter Nanostrukturen

Terms of Use

Please contact the responsible person, Prof. Dr. Thomas Fromherz

Contact

Prof. Dr. Thomas Fromherz
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
thomas.fromherz@jku.at
http://www.jku.at/hfp/

Location

Location on map

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