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Large equipment

Physical Vapor Deposition of metals and semiconductors

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JKU - Johannes Kepler University Linz

Linz | Website


Short Description

Physical Vapor Deposition of metals and semiconductors in a high vacuum environment. Materials are evaporated either by direct current heating or by electron beam evaporation. Main applications are metal coatings for electrical interconnects in semiconductor devices.

Contact Person

Univ.-Prof. Dr. Armando Rastelli

Research Services

Physical Vapor Deposition system for metals and semiconductors. Main application: deposition of metallic leads on semiconductor devices.

Methods & Expertise for Research Infrastructure

Semiconductor technology

Allocation to Core Facility

Zentrum für Halbleiter Nanostrukturen

Terms of Use

For details please contact the responsible scientist.

Cooperation Partners

IST Austria
Univ. Rome Sapienza

Contact

Univ.-Prof. Dr. Armando Rastelli
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
armando.rastelli@jku.at
https://www.jku.at/hfp/

Location

Location on map

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