18 Research Infrastructures / Open for Collaboration
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- Large equipment
- 13
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- Spatial research infrastructure
- 4
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- Core facility (CF)
- 1
Research areas / Austrian Fields of Sciences
Top categories / 3 digits
Main groups / 1 digit
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- Technical Sciences
- 96.444%
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- Natural Sciences
- 3.556%
Sputter Cluster
Silicon Austria Labs GmbH (SAL)
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
Oxford ICP RIE Bosch 418441
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Oscilloscope Keysight Infiniium UXR0804a
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
Oxford ICP RIE Cl -based 418499
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Panalytical XRD
Silicon Austria Labs GmbH (SAL)
The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source....
Oxford PECVD 418440
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...
M8199A Arbitrary Waveform Generator
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Thin Film Deposition Leybold UNIVEX 900
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
EVG Smart View
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
EVG Bond & Alignment System
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.