18 Research Infrastructures / Open for Collaboration
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- Large equipment
- 13
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- Spatial research infrastructure
- 4
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- Core facility (CF)
- 1
Research areas / Austrian Fields of Sciences
Top categories / 3 digits
Main groups / 1 digit
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- Technical Sciences
- 96.444%
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- Natural Sciences
- 3.556%
EHD-Printer
Silicon Austria Labs GmbH (SAL)
SAL is the first institution worldwide offering completely new capabilities in high resolution printing to...
EVG Bond & Alignment System
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.
EVG Smart View
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
Heidelberg DWL 66
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...
Helios G4 SEM
Silicon Austria Labs GmbH (SAL)
The Helios G4 is a combined electron / focused ion beam microscope for topography and...
M8199A Arbitrary Waveform Generator
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Oscilloscope Keysight Infiniium UXR0804a
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
Oxford ICP RIE Bosch 418441
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Oxford ICP RIE Cl -based 418499
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Oxford PECVD 418440
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...