Silicon Austria Labs GmbH (SAL)
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Short Description
Cleanroom class 5 (EN ISO 14644-1)
Level of purity: not more than 29 particles, size ≥ 5,0 µm and 832 particles size ≥ 1,0 µm per cubic meter
Air circulation: h-1: 9
Ventilation: h-1: 120
Temperature (+/- 1K): 22 °C
Humidity (+/-5%): rF%: 50 %
Contact Person
DI Heimo Müller
Research Services
Sensor element / material Analysis, micro-electro-mechanical-systems, acoustic MEMS, photonic MEMS, Heterogeneous Integration Technologies (HIT), 3D-Integration, Chip-Bonding
Methods & Expertise for Research Infrastructure
Micro- Nanostructures, feasibility studies, tests, chipbonding, simulations
Allocation to Core Facility
The user will be supported by technical/scientific staff at the research infrastructure.
General terms and conditions of SAL https://silicon-austria-labs.com/en/terms-conditions/
General terms and conditions of SAL https://silicon-austria-labs.com/en/terms-conditions/