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Large equipment

Panalytical XRD

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Silicon Austria Labs GmbH (SAL)

Villach | Website


Short Description

The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source. The X’Pert Pro is capable of both high-resolution and lower-resolution measurements and enables a wide range of thin film and powder sample analysis. The X’Pert Pro is a modular system, making it very easy to switch between different measurement modes.

Contact Person

Heimo Müller

Research Services

Research Services
• X-ray diffraction on thin films on small samples and wafers up to 200 mm
• Specular diffraction, high resolution XRD, grazing incidence XRD, etc. for phase analysis, crystal quality, mosaicity, etc.
• 200 mm mapping possibility
• X-ray reflectivity for film thickness, density and roughness
• In-situ heating experiments of small samples up to 1100 °C in nitrogen atmosphere or vacuum

Methods & Expertise for Research Infrastructure

Available hardware includes:

-Two-bounce Ge monochromators for high-resolution diffraction
- An automatic beam attenuator for the incident beam optics made of a Ni foil.
- Masks ranging from 2 mm to 20 mm.
- Automated anti-scatter and divergence slits.
- 200 mm stage for mapping
- Anton Paar domed hot stage for in-situ heating experiments up to 1100 °C

Allocation to Core Facility

Silicon Austria Labs GmbH

Terms of Use

The terms of use are to be agreed individually. Send your request to the indicated contact. The GTC of SAL apply: https://silicon-austria-labs.com/agb/

Contact

Heimo Müller
heimo.mueller@silicon-austria.com
https://silicon-austria-labs.com/

Location

Location on map

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