18 Research Infrastructures / Open for Collaboration
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- Large equipment
- 13
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- Spatial research infrastructure
- 4
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- Core facility (CF)
- 1
Silicon Austria Labs GmbH (SAL)
Clean room class 5 (EN ISO 14644-1), 300 m² - Micro and nano fabrication: M(O)EMS,...
Silicon Austria Labs GmbH (SAL)
5G-Testbed for industrial equipment via wireless connections.
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
Silicon Austria Labs GmbH (SAL)
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
Silicon Austria Labs GmbH (SAL)
The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source....
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...