18 Research Infrastructures / Open for Collaboration
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- Large equipment
- 13
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- Spatial research infrastructure
- 4
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- Core facility (CF)
- 1
Research areas / Austrian Fields of Sciences
Top categories / 3 digits
Main groups / 1 digit
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- Technical Sciences
- 96.444%
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- Natural Sciences
- 3.556%
Thin Film Deposition Leybold UNIVEX 900
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
Sputter Cluster
Silicon Austria Labs GmbH (SAL)
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
Panalytical XRD
Silicon Austria Labs GmbH (SAL)
The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source....
Oxford PECVD 418440
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...
Oxford ICP RIE Cl -based 418499
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Oxford ICP RIE Bosch 418441
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Oscilloscope Keysight Infiniium UXR0804a
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
M8199A Arbitrary Waveform Generator
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Helios G4 SEM
Silicon Austria Labs GmbH (SAL)
The Helios G4 is a combined electron / focused ion beam microscope for topography and...
Heidelberg DWL 66
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...