18 Research Infrastructures / Open for Collaboration
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- Large equipment
- 13
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- Spatial research infrastructure
- 4
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- Core facility (CF)
- 1
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
Silicon Austria Labs GmbH (SAL)
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
Silicon Austria Labs GmbH (SAL)
The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source....
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Silicon Austria Labs GmbH (SAL)
The Helios G4 is a combined electron / focused ion beam microscope for topography and...
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.
Silicon Austria Labs GmbH (SAL)
SAL is the first institution worldwide offering completely new capabilities in high resolution printing to...
Silicon Austria Labs GmbH (SAL)
Clean room class 5 (EN ISO 14644-1), 300 m² - Micro and nano fabrication: M(O)EMS,...
Silicon Austria Labs GmbH (SAL)
5G-Testbed for industrial equipment via wireless connections.
Silicon Austria Labs GmbH (SAL)
Spezielles EBS-Validation-Labor für: - Prototyping und Testen von elektronikbasierten Systemen - Programmierung und Testen neuer,...
Silicon Austria Labs GmbH (SAL)
Silicon Austria Labs (SAL) ist ein europäisches Spitzenforschungszentrum für elektronikbasierte Systeme. Das industrieorientierte Forschungszentrum bietet...
Silicon Austria Labs GmbH (SAL)
Der Cleanroom II (Teil der SAL MicroFab in Villach) ist für 200-mm-Wafer ausgelegt und kann...