JKU - Johannes Kepler University Linz
Linz | Website
Short Description
System for optical lithography of structures with sizes doen to 500 nm
Contact Person
Prof. Dr. Thomas Fromherz
Research Services
Optical lithography
Methods & Expertise for Research Infrastructure
Optical lithography for metallization and etching
Allocation to Core Facility
Please contact the responsible person, Prof. Dr. Thomas Fromherz